Electrically controlled silicon microvalve,申请号PL20100392293-传众专利搜索

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发明名称	Electrically controlled silicon microvalve
摘要
申请公布号	PL218590(B1)	申请公布日期	2015.01.30
申请号	PL20100392293	申请日期	2010.09.01
申请人	INSTYTUT TECHNOLOGII ELEKTRONOWEJ	发明人	KOWALSKI PAWE&Lstrok,;LATECKI BOGDAN;SZMIGIEL DARIUSZ
分类号	H01L21/00;B81C1/00;F16K15/00;H01L21/3065;H01L27/00;H01M8/04	主分类号	H01L21/00
代理机构		代理人
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