| 发明名称 |
Superjunction structures for power devices |
| 摘要 |
In one general aspect, a power device includes an active region having a plurality of pillars of a first conductivity type alternately arranged with a plurality of pillars of a second conductivity type where the plurality of pillars of the second conductivity type in the active region each have substantially the same width. The power device includes a termination region surrounding at least a portion of the active region and having a plurality of pillars of the first conductivity type alternately arranged with a plurality of pillars of the second conductivity type where the plurality of pillars of the second conductivity type in the active region each have substantially the same width and are smaller than each width of the pillars of the second conductivity type in the termination region. The power device includes a transition region disposed between the active region and the termination region. |
| 申请公布号 |
US8928077(B2) |
申请公布日期 |
2015.01.06 |
| 申请号 |
US200812234549 |
申请日期 |
2008.09.19 |
| 申请人 |
Fairchild Semiconductor Corporation |
发明人 |
Lee JaeGil;Yun Chongman;Jang Hocheol;Rexer Christopher L.;Shenoy Praveen Muraleedharan;Reichl Dwayne S.;Yedinak Joseph A. |
| 分类号 |
H01L29/66;H01L29/78;H01L29/06;H01L29/08;H01L29/10;H01L29/40 |
主分类号 |
H01L29/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A power device, comprising:
an active region having a plurality of pillars of a first conductivity type alternately arranged with a plurality of pillars of a second conductivity type, the plurality of pillars of the second conductivity type in the active region each having substantially the same width; a termination region surrounding at least a portion of the active region and having a plurality of pillars of the first conductivity type alternately arranged with a plurality of pillars of the second conductivity type, the plurality of pillars of the second conductivity type in the active region each having substantially the same width and being smaller than each width of the pillars of the second conductivity type in the termination region; and a transition region disposed between the active region and the termination region, the transition region having a plurality of pillars of the first conductivity type alternately arranged with a plurality of pillars of the second conductivity type, the plurality of pillars of the second conductivity type in the transition region each having a width greater than each width of the pillars of the second conductivity type in the termination region, the plurality of pillars of the second conductivity type in the termination region each having substantially the same width. |
| 地址 |
South Portland ME US |
