| 摘要 |
The present invention relates to a device of cleaning a face plate having a plurality of holes and, more specifically, to a face plate cleaning device of a shower head including: a cleaning chamber which forms a cleaning space inside; a rotary mounting member which is installed inside the cleaning chamber to be located in the cleaning space and to be able to rotate, and has a mounting unit in which the face plate is mounted so that the both sides of the hole are opened; a spray nozzle which is installed in the rotary mounting member to spray a cleaning solution to the inner side of the hole; a cleaning solution supply unit which supplies the cleaning solution to the spray nozzle to spray; and rotary driving unit which discharges the cleaning solution inside the hole to the outside by centrifugal force by rotating the rotary mounting member. According to the present invention, the cleaning solution for the hole of the face plate is sprayed and cleaning is executed by the centrifugal force by mounting the face plate of the shower head on a separate device. Therefore, cleaning efficiency of the face plate can be improved and the time and effort required to clean can be reduced by preventing contamination of a process chamber and a peripheral device in a cleaning process. |
