发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which is thin and has high reliability without deteriorating adhesion when connecting a semiconductor element and a base material, or connecting semiconductor elements with each other.SOLUTION: A semiconductor device manufacturing method comprises: a die bonding process of sequentially adhering each semiconductor element 1SA to a base material on a heated stage or to a predetermined position of a semiconductor element 10 in a lower stage; a process of connecting a terminal formed in an opening of the semiconductor element 10 and a terminal 13 formed on the base material by a bonding wire; and a process of encapsulating the semiconductor element 10 and the bonding wire. The die bonding process is a process of adhering each semiconductor element to the base material or to the predetermined position of the semiconductor element in the lower stage by using a semi-cured adhesive, a semi-cured film or a liquid adhesive (B-stage adhesive) 12.
申请公布号 JP2014187167(A) 申请公布日期 2014.10.02
申请号 JP20130060693 申请日期 2013.03.22
申请人 TOSHIBA CORP 发明人 YOSHIMURA ATSUSHI;MATSUSHIMA RYOJI
分类号 H01L25/065;H01L21/301;H01L21/50;H01L21/52;H01L25/07;H01L25/18 主分类号 H01L25/065
代理机构 代理人
主权项
地址