METHOD AND ARRANGEMENT FOR FORMING A STRUCTURING ON SURFACES OF COMPONENTS BY MEANS OF A LASER BEAM

摘要

The invention relates to a method for forming a structuring on surfaces of components by means of a laser beam. In the case of the invention, a laser beam is directed onto a diffractive optical element. The diffractive optical element is designed such that the laser beam is split into at least two partial beams and the partial beams are directed at an angle α relative to the optical axis of the laser beam onto at least one further optical element, the latter being transparent to the laser radiation. The further optical element(s) has/have a first surface and a second surface, which is inclined at an angle relative to the optical axis of the laser beam, at which the beam direction of the partial beams is altered by optical refraction. In the beam path of the partial beams, a focusing optical lens is arranged between the further optical element(s) and a component surface to be processed, and the partial beams are focused such that they impinge on the surface of the component at a common position at an angle ß of incidence relative to the optical axis of the laser beam. The distance d1 between the optical elements is varied in order to vary the interference period.