LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIUM FOR LIQUID PROCESSING

摘要

PROBLEM TO BE SOLVED: To obtain filtration efficiency by a single filter, which is similar to the filtration efficiency when a plurality of filters is provided, and to prevent decrease in throughput.SOLUTION: A liquid processing apparatus is configured in such a manner that: based on a control signal from a control unit 101, a resist liquid L is sucked into a diaphragm pump 70 through a filter 52; a part of the resist liquid sucked in the pump is discharged from a discharge nozzle 7; the remaining resist liquid is returned to a supply conduit 51b on a primary side of the filter; a resist liquid is synthesized by adding a replenishment amount of the liquid equal to the discharged amount to the return amount by driving a supply pump 80; and discharge of the synthesized resist liquid and filtration thereof by the filter are carried out the number of times corresponding to a synthesis at a rate between the discharge amount and the return amount.