,申请号JP20090143230-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP5507126(B2)	申请公布日期	2014.05.28
申请号	JP20090143230	申请日期	2009.06.16
申请人		发明人
分类号	H01L21/203;C23C14/32;H05H1/48	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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