发明名称
摘要 <p>A method and structure for reducing cracks in a dielectric in contact with a metal structure. The metal structure comprises a first metal layer; a second metal layer disposed on, and in contact with the first metal layer, the second metal layer being stiffer than the first metal layer; a third metal layer disposed on, and in contact with the second metal layer, the second metal layer being stiffer than the third metal layer. An additional metal is included wherein the dielectric layer is disposed between the metal structure and the additional metal.</p>
申请公布号 JP5364087(B2) 申请公布日期 2013.12.11
申请号 JP20100501052 申请日期 2008.03.12
申请人 发明人
分类号 H01L21/822;H01G4/12;H01G4/33;H01L27/04 主分类号 H01L21/822
代理机构 代理人
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