发明名称 SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHOD AND APPARATUS
摘要 A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.
申请公布号 KR20130132906(A) 申请公布日期 2013.12.05
申请号 KR20137017920 申请日期 2011.09.22
申请人 NIKON CORPORATION 发明人 WATANABE YOJI;OWA SOICHI;FUJIWARA TOMOHARU
分类号 H01L21/027 主分类号 H01L21/027
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