Processing station e.g. screen printing for planar substrate e.g. blank solar cell wafer, has two interchange points that are respectively arranged in regions of processing units between transportation lines and linear transport units

摘要

The processing station (10) has two transportation lines (16,18) that are arranged parallel to each other for planar substrates. Two processing units (12,14) are placed between the transportation lines. A moving unit is provided for moving the substrates from the transportation line to the processing units having substrate supports (36,38,40,42). Two interchange points (24,28) are respectively arranged in the regions of the processing units between the transportation lines and linear transport units. An independent claim is included for method for processing planar substrate.