| 摘要 |
A spectroscopic sensor 1 comprises a plurality of interference filter units 20A, 20B, 20C, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough the light incident on the units 20A, 20B, 20C; and a light detection substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the units 20A, 20B, 20C. The second mirror layers 23 are separated for the respective units 20A, 20B, 20C. The cavity layer 21 is formed integrally over the units 20A, 20B, 20C, while a part of the layer 21 enters a region between the second mirror layers 23, 23 adjacent to each other. |
