| 摘要 |
A semiconductor device fabricating method includes forming an etch target layer and a first hard mask layer over a substrate, forming a second hard mask pattern having lines over the first hard mask layer, forming a third hard mask layer over the second hard mask pattern, forming a sacrificial pattern over the third hard mask layer, forming a cell spacer on sidewalls of the sacrificial pattern, removing the sacrificial pattern, etching the third hard mask layer using the cell spacer as an etch barrier, etching the first hard mask layer using the third hard mask pattern and the second hard mask pattern as etch barriers, forming an elliptical opening having an axis pointing in a second direction by etching the etch target layer, and forming a silicon layer that fills the elliptical opening.
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