METHOD AND APPARATUS FOR MANUFACTURING OF SOLAR CELL

摘要

PURPOSE: A solar cell manufacturing method and a manufacturing apparatus thereof are provided to reduce fabrication costs by using a mask member and a target for forming a solar cell electrode. CONSTITUTION: A mask member(1140) has at least two opening parts. The mask member is arranged in the upper side of a solar cell. A target(1160) is made of a conductive material. A target material is deposited on the upper side of the solar cell. At least two electrodes are formed by a deposition process.