SYSTEM AND METHOD FOR GROWTH OF ENHANCED ADHESION CARBON NANOTUBES ON SUBSTRATES

摘要

Disclosed herein is a method of growth of enhanced adhesion MWCNTs on a substrate, referred to as the HGTiE process, the method comprising: chemical vapor deposition of an adhesive underlayer composed of alumina on a substrate composed of titanium or similar; chemical vapor deposition of a catalyst such as a thin film of iron on top of the adhesive underlayer; pretreatment of the substrate to hydrogen at high temperature; and exposure of the substrate to a feedstock gas such as ethylene at high temperature. The substrate surface may be roughened before placement of an adhesive layer through mechanical grinding or chemical etching. Finally, plasma etching of the MWCNT film may be performed with oxygen plasma. This method of growth allows for high strength adhesion of MWCNTs to the substrate the MWCNTs are grown upon.