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发明名称
Substrate supported apparatus
摘要
<p>본 발명은 기판 지지 장치에 관한 것으로, 기판이 놓여진 지지판 및 지지판에 회동 가능하게 관통 설치되고, 지지판이 세워지면 타측이 아래로 회동함에 따라 일측이 위로 회동하여, 일측이 기판을 거치 및 고정하는 고정수단을 포함하여 구성되어 고정수단이 기판과 접하는 면적을 최소화하여 기판의 열팽창을 자유롭게 하여 기판의 손상을 방지할 수 있는 효과가 있다.</p>
申请公布号
KR101216501(B1)
申请公布日期
2012.12.31
申请号
KR20110045937
申请日期
2011.05.16
申请人
发明人
分类号
C23C14/50;H01L21/205;H01L21/683
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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