CHEMICAL VAPOR DEPOSITION APPARATUS FOR FLAT DISPLAY

摘要

PURPOSE: A chemical vapor deposition apparatus for a flat panel display is provided to stably support a large-area susceptor with a plurality of anti-sagging units using pneumatic pressure. CONSTITUTION: A chemical vapor deposition apparatus for a flat panel display comprises a chamber(10) where deposition on a glass substrate(G) takes place, a susceptor(30) mounted with the glass substrate at the top and lifted within the chamber, and a plurality of anti-sagging units(50) supporting the susceptor with pneumatic pressure.