发明名称 |
SEMICONDUCTOR DEVICE, DISPLAY MODULE, AND ELECTRONIC APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device which allows suppressing a cost without complicating a manufacturing process by forming a thin-film transistor using an oxide semiconductor film represented by zinc oxide, and to provide a manufacturing method of the semiconductor device. <P>SOLUTION: In a semiconductor device in which a gate electrode is formed on a substrate, a gate insulating film is formed to cover the gate electrode, an oxide semiconductor film is formed on the gate insulating film, and a first conductive film and a second conductive film are formed on the oxide semiconductor film. The oxide semiconductor film has at least a region crystallized in a channel forming region. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2012248863(A) |
申请公布日期 |
2012.12.13 |
申请号 |
JP20120160408 |
申请日期 |
2012.07.19 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
AKIMOTO KENGO;HONDA TATSUYA;SONE HIROTO |
分类号 |
H01L29/786;C23C14/34;G02F1/1368;G02F1/167;H01L21/20;H01L21/28;H01L21/336;H01L51/50 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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