| 摘要 |
<P>PROBLEM TO BE SOLVED: To make an observation for suitable detection corresponding to an observation object. <P>SOLUTION: An observation device includes: a transmission type observation device including first branch means 3 of branching incident light into first reference light and first measurement light, a first illumination optical system which lights up the observation object obliquely with the first measurement light, first composition means 4 of putting together transmitted light from the obliquely lighted-up observation object and the first reference light, and first detection means 16 of detecting first interference light of the first reference light and the transmitted light from the observation object; and a reflection type observation device including second branch means 4 of branching incident light into second reference light and second measurement light, a second illumination optical system which lights up the observation object with the second measurement light, second composition means 4 of putting together the second reference light and reflected light from the observation object, and second detection means 16 of detecting second interference light of the second reference light and the reflected light from the observation object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
