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发明名称
摘要
申请公布号	JP4975414(B2)	申请公布日期	2012.07.11
申请号	JP20060308013	申请日期	2006.11.14
申请人		发明人
分类号	H01L21/316;C23C16/40;H01L21/312	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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