| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce damage to a glass substrate in a peripheral film removal process of a thin film solar battery, thereby reducing laminate film particles left on the substrate in a peripheral region and preventing shorting between adjacent cells. <P>SOLUTION: A thin film solar battery disposes on a substrate 1 made of glass a plurality of unit cells of a thin film solar battery having a laminate film 7 composed of a first electrode layer 2, a photoelectric conversion layer 4, and a second electrode layer 6 which are laminated one on top of another. The manufacturing method for the thin film solar battery comprises: a process of forming a heat resistant resin layer 8 on the outer periphery of the substrate 1; a process of laminating the laminate film 7 on the substrate 1 which has the heat resistant resin layer 8 formed thereon; a separation groove formation process of forming a plurality of separation grooves (91, 93) which divide the laminate film 7 into plural unit cells continuously until they reach the top of the heat resistant resin layer 8 on the outer periphery of the substrate 1; and an outer peripheral film removal process which includes a process of leaving partially the laminate film 7 on the heat resistant resin layer 8 which has separation grooves formed therein and removing the rest of the laminate film 7 on the outside thereof together with the heat resistant resin layer 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
