| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film formation apparatus and a film formation method, which can achieve roll-to-roll thin film formation in a vacuum, even when a base material film is a film, which has weak tension, or is a film in which flaws or cracks are easy to be generated. <P>SOLUTION: In the film deposition apparatus, film formation particles are deposited on one surface of a base material film in a vacuum vessel to form a thin film. The film formation apparatus includes a film transfer means having: a base material film winding-off shaft, mounted with the roll-shaped base material film and winding-off it; a can roll, depositing the film formation particles on one surface of the base material film, while winding the base material film wound off from the roll-shaped base material film and holding it, to form a thin film; and a winding shaft, winding the base material film after the formation of the thin film. The film transfer means includes: a protective film winding-off shaft, mounted with a roll-shaped protective film and winding-off it; and a protective film pasting part, pasting the protective film, wound off from the roll-shaped protective film, onto the other surface of the base material film before being wound and held in the can roll. <P>COPYRIGHT: (C)2012,JPO&INPIT |
