| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability by securely sealing a member having a sealing groove while reducing machining man-hours of the sealing groove. <P>SOLUTION: An opening is formed on a vacuum member. The sealing groove, in which at least either of an O-ring or round rubber is fitted and inserted, is formed around the opening. A cross sectional shape of the sealing groove is a trapezoid, which is an axisymmetric shape with respect to a width direction of the groove, inclines to a center, and includes an approximately flat part in a center part. An edge shape of a tip end part of the machining tool for machining the sealing groove projects in a tip end direction from an outer circumference part to a center part, inclines toward a center, and includes a recessed relief part in the center part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
