| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composite sensor element which can detect forces such as rotation angular speed and acceleration with one sensor and has a simple structure as well as a fast response speed, and to provide a composite sensor using the composite sensor element and a composite sensor device using the composite sensor. <P>SOLUTION: A composite sensor element 1 comprises: a supporting section 12; a gyro vibration piece 10 which has vibration arms 13 and 14 provided with driving electrodes 15a and 15b; and a mass section 2 which has an elastic beam section where a base section 3 and a spindle section 5 are connected. The gyro vibration piece 10 is connected to the mass section 2 through a connection member 96 in such a manner that the vibration arm 14 and a main surface 5a that faces the spindle 5 are supported in a cantilever manner almost in parallel with a distance (g). A composite sensor 20 has a package 30 where a composite sensor element 1 is connected therein and a lid 40 is connected thereon through a sealing 39 thereon. In an inner space T formed by the package 30 and the lid 40 is filled with gas. <P>COPYRIGHT: (C)2012,JPO&INPIT |
