发明名称 PMOS-, NMOS- UND CMOS-HALBLEITERANORDUNUNGEN UND VERFAHREN ZU DEREN HERSTELLUNG
摘要 <p>The invention includes methods of forming circuit devices. A metal-containing material comprising a thickness of no more than 20 Å (or alternatively comprising a thickness resulting from no more than 70 ALD cycles) is formed between conductively-doped silicon and a dielectric layer. The conductively-doped silicon can be n-type silicon and the dielectric layer can be a high-k dielectric material. The metal-containing material can be formed directly on the dielectric layer, and the conductively-doped silicon can be formed directly on the metal-containing material. The circuit device can be a capacitor construction or a transistor construction. If the circuit device is a transistor construction, such can be incorporated into a CMOS assembly. Various devices of the present invention can be incorporated into memory constructions, and can be incorporated into electronic systems.</p>
申请公布号 AT535012(T) 申请公布日期 2011.12.15
申请号 AT20040716958T 申请日期 2004.03.03
申请人 MICRON TECHNOLOGY, INC. 发明人 EPPICH, DENISE;WEIMER, RONALD
分类号 H01L21/28;H01L21/02;H01L21/8238;H01L21/8242;H01L27/06;H01L27/108;H01L29/49;H01L29/51 主分类号 H01L21/28
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