TEMPERATURE CONTROLLER, FLUID CIRCULATOR, AND TEMPERATURE CONTROL METHOD USING TEMPERATURE CONTROLLER

摘要

PURPOSE: A temperature controller, a fluid circulation system, and a temperature control method using the temperature controller are provided to reduce manufacturing cost by installing only one flow control valve. CONSTITUTION: A transfer path transfers temperature fluid from a first circulator(2) to a second circulator(3). An outflow path(5) leaks the temperature fluid from the second circulator to the second circulator and returns. A control device(60) comprises a valve controller(62) and a lamp controller(64). A vacuum chamber(C) comprises a susceptor which loads a semiconductor wafer. A supply pump(30) supplies the temperature fluid to the vacuum chamber. A flux control valve(40) which controls the transfer flux of the temperature fluid from the first circulator is installed in the transfer path.