| 摘要 |
<p>PURPOSE: A decompression drying method and a decompression drying apparatus are provided to obtain the thickness of remaining film of a coating film and improved line width thereof in forming a wire pattern. CONSTITUTION: In a decompression drying method and a decompression drying apparatus, a solvent from a coating film is vaporized to dry a coating film under decompression environment. In a first step, a substrate having a coating film is received into a chamber and the pressure of a chamber is downed by a first decompression speed and is higher than the vapor pressure of a solvent(S1-S3). The pressure of the chamber is downed by second decompression speed until it is reached to the vapor pressure of the solvent.</p> |
