| 摘要 |
PROBLEM TO BE SOLVED: To provide a saturated steam generator capable of stably generating saturated steam at an intended temperature without performing replenishment of water at room temperature to a saturation tank which may cause unstable water temperature. SOLUTION: A controller 50 includes a temperature control table indicating a front saturation tank liquid temperature Ta measured beforehand and making a temperature difference between a saturation tank liquid temperature Tc and a saturated steam temperature Td approximately equal, in accordance with the saturated steam temperature Td. The controller 50 controls a heater 12 of a front saturation tank 10 by using the front saturation tank liquid temperature Ta determined by the temperature control table with respect to an intended saturated steam temperature as a set value so that the front saturation tank liquid temperature Ta measured by a front saturation tank liquid temperature sensor T10 corresponds to the set value. COPYRIGHT: (C)2011,JPO&INPIT
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