Appareil et procédé de production de pellicules épitaxiales,申请号FR19670089788-传众专利搜索

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发明名称	Appareil et procédé de production de pellicules épitaxiales
摘要
申请公布号	FR1509254(A)	申请公布日期	1968.01.12
申请号	FR19670089788	申请日期	1967.01.03
申请人	MONSANTO COMPANY	发明人
分类号	C23C16/00;C30B25/08;C30B29/40;C30B35/00;H01L21/205	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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