发明名称 |
Phase-shifting element and particle beam device having a phase-shifting element |
摘要 |
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
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申请公布号 |
US7902506(B2) |
申请公布日期 |
2011.03.08 |
申请号 |
US20080070055 |
申请日期 |
2008.02.14 |
申请人 |
CARL ZEISS NTS GMBH;MAX-PLANCK-GESELLSCHAFT ZUR FORDERUNG DER WISSENSCHAFTEN E.V. |
发明人 |
SCHROEDER RASMUS;BARTON BASTIAN;BENNER GERD;ROSE HARALD |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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