| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of cleaning of an electronic apparatus with a small quantity of cleaning liquid without impairing the function of the electronic apparatus, and capable of being downsized.SOLUTION: The cleaning apparatus for electronic apparatus and cleaning method of electronic apparatus is characterized in that, related to the cleaning apparatus for electronic apparatus which is composed of a cleaning part, a refining part connected to the cleaning part and a drying part integrated with and/or adjoined to the cleaning part, deposits to an object to be cleaned are removed by spray-cleaning the object to be cleaned including an electronic apparatus by using a cleaning liquid on the cleaning part during at least one process, the deposits are separated from the cleaning liquid containing the deposits which are fed from the cleaning part on the refining part, vacuum drying of the object to be cleaned is performed on the drying part, and at least one of cleaning liquid containing any one among pure water, alkali-electrolytic water and fluorine type cleaning liquid is used as the cleaning liquid. |
