发明名称 Crystalline silicon solar cells on low purity substrate
摘要 A method is provided for making a crystalline silicon solar cell on a low purity substrate by depositing p+-p-n+, or n+-n-p+ layers of amorphous silicon, depending on the type of wafer, on a crystalline silicon substrate, such as an upgraded metallurgical grade silicon substrate, with substrate vias of varying diameters formed thereon, annealing the stack of amorphous silicon layers to cause solid phase epitaxial crystallization, and metallizing the substrate assembly using standard metallization techniques. One embodiment of the present invention provides depositing a passivation layer onto the third deposited silicon layer subsequent to the crystallization. Another embodiment provides depositing a passivation layer on the back side of the substrate subsequent to crystallization and punching selected regions at the substrate vias prior to back metallization.
申请公布号 US7858427(B2) 申请公布日期 2010.12.28
申请号 US20090396909 申请日期 2009.03.03
申请人 APPLIED MATERIALS, INC. 发明人 RANA VIRENDRA V.
分类号 H01L21/00;H01L21/20;H01L31/042 主分类号 H01L21/00
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