发明名称 METHOD FOR GROWING SILICON CARBIDE SINGLE CRYSTAL
摘要 <p>In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C by dissolving C into the melt that contains Si, Cr and X, which consists of at least one element of Sn, In and Ga, such that the proportion of Cr in the whole composition of the melt is in a range of 30 to 70 at. %, and the proportion of X is in a range of 1 to 25 at. %, and the silicon carbide crystal is grown from the solution.</p>
申请公布号 KR20100100971(A) 申请公布日期 2010.09.15
申请号 KR20107015588 申请日期 2009.01.14
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 TERASHIMA YUKIO;FUJIWARA YASUYUKI
分类号 C30B15/00;C30B19/00;C30B29/36;H01L21/02 主分类号 C30B15/00
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