| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting an electronic device which improve the production efficiency of the electronic device. Ž<P>SOLUTION: The electronic device 6 to be adopted as an acceleration sensor or an inclination angle sensor is supplied to an implement 7 held by a turntable 5, and the implement 7 supplied with the electronic device 6 is conveyed in the sequence of a normal temperature inspection unit 10, a low temperature inspection unit 11, and a high temperature inspection unit 12 by the turntable 5 rotated in a prescribed direction. The electronic device 6 conveyed to these inspection units is inclined in the states of normal temperature, low temperature and high temperature and subjected to inspection of electronic characteristics and is then collected sequentially from a position for collection disposed near the position for supply of the electronic device 6. By repeating this series of operations, the inspection and collection of the electronic device 6 can be continuously and efficiently performed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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