SUBSTRATE, SUBSTRATE HOLDING APPARATUS, ANALYSIS APPARATUS, PROGRAM, DETECTION SYSTEM, SEMICONDUCTOR DEVICE, DISPLAY APPARATUS, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate, a substrate holding apparatus, an analysis apparatus, a program, a detection system, a semiconductor device, a display apparatus and a semiconductor manufacturing apparatus, which can detect or analyze information regarding the temperature of a substrate that can be used in an environment where the substrate has a high temperature and prevent decrease in the flexibility in the processing work of the substrate. SOLUTION: A plurality of resonators 5 are placed on a wafer W. The resonators 5 are each equipped with a base rectangular, in plan view, and a capacitor 52 and an inductor 53 which are formed on the base 51, and form an LC tank circuit. COPYRIGHT: (C)2010,JPO&INPIT