发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor substrate; a first gate insulation film formed on the semiconductor substrate; a second gate insulation film formed on the semiconductor substrate; a first gate electrode formed on the first gate insulation film and fully silicided; and a second gate electrode formed on the second gate insulation film and fully silicided, a gate length or a gate width of the second gate electrode being larger than that of the first gate electrode, and a thickness of the second gate electrode being smaller than that of the first gate electrode.
申请公布号 US2010062575(A1) 申请公布日期 2010.03.11
申请号 US20090618402 申请日期 2009.11.13
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KINOSHITA ATSUHIRO;TSUCHIYA YOSHINORI;KOGA JUNJI
分类号 H01L21/8238 主分类号 H01L21/8238
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