| 摘要 |
PURPOSE: A substrate transport device with a substrate sensor is provided to copes with external impact delivered to a substrate using a guide roller. CONSTITUTION: A substrate transport device with a substrate sensor(40) comprises a transport unit(20), a guide roller, and a substrate sensor. The transport unit transfers a substrate(10) in the fixed direction. The guide roller supports the substrate on one end of the transport unit. The substrate sensor is integrated with one side of the guide roller to detect the access of a substrate. A piezoelectric member senses a contact signal of substrate. A support block supports the piezoelectric member on the rear side of the piezoelectric member.
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