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发明名称
Micromechanical membrane sensor and corresponding production method
摘要
申请公布号
EP2152627(A2)
申请公布日期
2010.02.17
申请号
EP20080717248
申请日期
2008.02.29
申请人
ROBERT BOSCH GMBH
发明人
KNESE, KATHRIN;WEBER, HERIBERT;ARMBRUSTER, SIMON
分类号
B81B3/00;G01L9/00
主分类号
B81B3/00
代理机构
代理人
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