发明名称 Floating gate non-volatile memory device and method for manufacturing same
摘要 The invention relates to a floating gate non-volatile memory cell. The semiconductor material of the substrate and the materials of the floating and control gates are chosen in a predetermined way. In particular, the tunnelling current between the floating gate and the control gate is suppressed relative to the tunnelling current between the floating gate and the substrate, both during programming and erasing the cell, as a result of a predetermined choice of materials at the interfaces with the interposed dielectrics, more particularly such that the work functions at these interfaces meet predetermined requirements. In preferred embodiments, the floating gate comprises at least two layers.
申请公布号 EP2068351(A1) 申请公布日期 2009.06.10
申请号 EP20080157365 申请日期 2008.05.30
申请人 IMEC 发明人 ROSMEULEN, MAARTEN
分类号 H01L21/28;H01L21/762;H01L29/423 主分类号 H01L21/28
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