CONTAMINANT REMOVING METHOD, AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a contaminant removing method with which contaminants adhered to a prescribed optical member in an optical system can be quickly removed.

SOLUTION: The contaminant removing method of removing contaminants adhering to a surface of the optical member in the optical system includes a first process of measuring prescribed optical characteristics of the optical system and judging whether the contaminants adhering to the optical member are removed on the basis of the measurement result; a second process of removing the contaminants adhering to the optical member using prescribed cleaning fluid; a third process of removing the cleaning fluid from the optical member; and a fourth process of finding information regarding contaminants remaining on the optical member.

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