| 摘要 |
PURPOSE:To improve a laser oscillation efficiency and to contrive the prolongation of the lives of a pre-ionization electrode and the laser gas by a method wherein a pre-discharge feed pipe and a gas discharge tube are provided on the side of the upper stream of a laser gas flow path between main electrodes. CONSTITUTION:When a power supply 22 for pre-ionization use is operated and a high-voltage high-frequency pulse is applied to a coil 21 for pre-discharge generation use, rare gas, such as He gas or the like, which is fed to a pre- discharge feed pipe 20 from the outside, is ionized, pre-ionization discharge plasma is generation and the generated discharge plasma moves to the side of main electrodes 1 and 2 by a gas flow 12. On the other hand, a switch 7 is closed on the side of the main discharge 1, a voltage charged in a capacitor Cs 5 is inverted and is added to a capacitor Cb 10 and glow discharge 11 is generated. In the case of a CO2 gas laser, CO2 gas and N2 gas are fed from a gas feed pipe 23 and the component of laser gas is kept constant. By this constitution, an uniform pre-ionization becomes possible, a laser oscillation efficiency is improved and the prolongation of the lives of the pre-ionization electrode and the laser gas can be contrived. |
