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发明名称
THIN FILM TEMPERATURE CONDUCTIVITY MEASURING SYSTEM
摘要
申请公布号
JPH04273144(A)
申请公布日期
1992.09.29
申请号
JP19910033815
申请日期
1991.02.28
申请人
NEC CORP
发明人
OKUDA SHINICHI
分类号
H01L21/66;G01N25/18
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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