DEPOSITION METHOD USING POWDER MATERIAL AND DEVICE THEREBY

摘要

Method and device for forming a deposition film using solid powder material are provided to accelerate collision velocity of aerosol particles to a base material by increasing an initial pressure of a transfer gas by reducing vacuum degree of a deposition part and increasing an instant supply amount of the transfer gas. A method of forming a deposition film using solid powder material comprises the steps of: forming raw powder into aerosols by supplying external transfer gas into space where the raw powder having a size larger than 1nm, and forming a thin film by spraying aerosol particles to space where a base material is placed, where collision velocity of the aerosol particles is increased by causing amplified decompression by intermittently closing a region including the space where the base material is placed.