发明名称 |
Profiling complex surface structures using scanning interferometry |
摘要 |
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
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申请公布号 |
US7466429(B2) |
申请公布日期 |
2008.12.16 |
申请号 |
US20070768550 |
申请日期 |
2007.06.26 |
申请人 |
ZYGO CORPORATION |
发明人 |
DE GROOT PETER J.;STONER ROBERT;DE LEGA XAVIER COLONNA |
分类号 |
G01B11/02;G01B9/02;G01B11/06;G01N21/95 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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