THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR FABRICATING THE SAME

摘要

A TFT(Thin Film Transistor) array substrate having an active layer and a manufacturing method thereof are provided to use organic-inorganic semiconductor layers as an active pattern, thereby easily forming the active pattern without a special deposition and photo process. An insulting substrate(200) has a bottom gate electrode(202). A gate insulating layer(204) is formed on the insulating substrate. An active layer(206) is formed on the substrate having the gate insulating layer so as to cover a region corresponding to the bottom gate electrode, and comprises organic-inorganic semiconductor layers. Source and drain electrodes are formed on the substrate having the active layer. A pixel electrode is electrically connected with the drain electrode.