METHOD FOR MANUFACTURING SUBSTRATE MOUNTING TABLE

摘要

A method for fabricating a substrate mounting table is provided to avoid contamination caused by spray residue by preventing spray residue from being left in a coolant gas supply path. A removable coating layer is formed on the inner wall of a gas supply path confronting at least a gas discharge hole(511). A ceramic spray layer(10) is formed on the mounting surface of a substrate. The coating layer is eliminated. While compressed gas is discharged from the gas discharge hole in the ceramic spray process, ceramic is sprayed onto the mounting surface.