| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable elastic wave device by improving adhesiveness of a sealed portion to a substrate and an interconnection. <P>SOLUTION: The elastic wave device according to the present invention is equipped with a comb-shaped electrode provided on a piezoelectric substrate (10), an elastic surface-wave element (12) comprising a reflector or the like, an interconnection (14) which is provided on the piezoelectric substrate (10) and is connected electrically with the elastic surface-wave element (12), a sealed portion (24) which includes a cavity (20) on a functional portion of the elastic surface-wave element (12) and is provided so as to cover the elastic surface-wave element (12) and the interconnection (14), and an insulating film layer (30) provided between the piezoelectric substrate (10), and the interconnection (14) and the sealed portion (24). <P>COPYRIGHT: (C)2008,JPO&INPIT |
