| 摘要 |
PROBLEM TO BE SOLVED: To enable a user to obtain more than two kinds of information indicating whether more than one recipe is identical or not, and to know the meaning of difference between two recipes accurately. SOLUTION: More than two kinds of information can be obtained by a recipe storage 133 storing one or more recipes, i.e. information about a process held by one or more controllers 12 controlling one or more processors performing a predetermined process for a substrate to be processed, respectively, in corresponding with one or more controller, respectively, as well as a master recipe becoming a reference recipe, and process information management equipment 13 acquiring information about coincidence of the master recipe and one or more recipes which is one kind of information about coincidence out of more than two kinds of information about coincidence for every one or more recipes, and outputting coincidence information thus acquired for every recipe. COPYRIGHT: (C)2008,JPO&INPIT
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