| 摘要 |
PROBLEM TO BE SOLVED: To achieve a sample measuring apparatus for measuring and adjusting plane data in a short time even if an adjustment requires a long time and a large effort since the precision of the planarity of a sample stage in the sample measuring apparatus needs to be strictly adjusted before a measurement is initiated. SOLUTION: The sample measuring apparatus comprises: the sample stage having a plurality of measurement points; a microscope provided on the sample stage; a camera mounted to the microscope, and capturing images at the measurement points; an image processing section for obtaining a contrast signal from image signals from the camera; a XY positioning mechanism for sequentially positioning an optical axis of the microscope to a plurality of the measurement points on the sample stage; a Z-axis movement mechanism for vertically moving the microscope; and a control section for controlling them. The control section controls a focus position of the microscope from an output from the image processing section and detects a Z-axis position corresponding to the focus position of the microscope at a plurality of the measurement points. COPYRIGHT: (C)2008,JPO&INPIT
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