发明名称 Method for removing photoresist using a thermal bake in the presence of hydrogen and a semiconductor device manufactured using the same
摘要 The present invention provides a method for removing photoresist, and a method for manufacturing a semiconductor device. The method for removing photoresist, without limitation, may include subjecting a photoresist layer ( 210 ) located over a substrate ( 110 ) to a thermal bake ( 410 ) in the presence of hydrogen, and then removing the photoresist layer ( 210 ).
申请公布号 US2007037357(A1) 申请公布日期 2007.02.15
申请号 US20050201930 申请日期 2005.08.11
申请人 TEXAS INSTRUMENTS INC. 发明人 CULP DONALD W.
分类号 H01L21/331 主分类号 H01L21/331
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