SYSTEMS AND METHODS FOR FABRICATING MICROSTRUCTURES BY IMAGING A RADIATION SENSITIVE LAYER SANDWICHED BETWEEN OUTER LAYERS, AND MICROSTRUCTURES FABRICATED THEREBY

摘要

Microstructures are fabricated by imaging a microstructure master blank that includes a radiation sensitive layer (2320) sandwiched between a pair of outer layers (2310, 2330), on an imaging platform (2500), to define the microstructures in the radiation sensitive layer. At least one of the outer layers is then removed. The microstructures that were defined in the radiation sensitive layer are developed. The radiation sensitive layer sandwiched between the pair of outer layers may be fabricated as webs, to provide microstructure master blanks. ® KIPO & WIPO 2007